To overcome the bottle - neck , electron cyclotron resonance - plasma enhanced metalorganic chemical vapor deposition was developed 為了解決這一問(wèn)題,電子回旋共振ecr等離子體增強(qiáng)有機(jī)金屬氣相沉積( ecr - pemocvd )應(yīng)運(yùn)而生。
In this thesis , the zns , znse films and znse quantum dots ( qds ) have been obtained by metalorganic chemical vapor deposition ( mocvd ) 本論文利用金屬有機(jī)化學(xué)氣相沉積( mocvd )系統(tǒng)控制生長(zhǎng)條件制備了zns 、 znse薄膜和znse量子點(diǎn)。
Mg ions were implanted on mg - doped gan grown by metalorganic chemical vapor deposition . the p - type gan was achieved with high hole concentration 8 . 2810 應(yīng)用mg離子注入mocvd法生長(zhǎng)摻雜mg的gan中,在經(jīng)過(guò)800 , 1h的退火后,獲得高空穴載流子濃度8 . 2810
At present the prevailing epitaxial growth techniques of gan are metalorganic chemical vapor deposition ( mocvd ) , molecule beam epitaxy ( mbe ) as well as hvpe 目前gan的外延生長(zhǎng)技術(shù)一般采用有機(jī)金屬化學(xué)氣相外延法( mocvd ) ,在藍(lán)寶石襯底的( 0001 )面上外延生長(zhǎng)gan材料,另外還有分子束外延技術(shù)( mbe )及鹵化物汽相外延技術(shù)( hvpe )等。
Thin sin layers and nitride - based multiquantum well ( mqw ) light emitting diode ( led ) structures with conventional single gan buffer and gan / sin double buffers were grown on sapphire substrates by metalorganic chemical vapor deposition ( mocvd ) 摘要以有機(jī)金屬化學(xué)氣象沉積在藍(lán)寶石基板上成長(zhǎng)由單一氮化鎵成核層與氮化鎵/氮化矽雙緩沖層所形成的兩種不同氮基礎(chǔ)的多層量子井發(fā)光二極體結(jié)構(gòu)。
In order to study these two questions , high quality nanocrystalline zno thin films were prepared by thermal oxidation of zns thin films , which were deposited by using low pressure metalorganic chemical vapor deposition technique 針對(duì)這兩方面問(wèn)題我們做了如下研究:利用低壓金屬有機(jī)化學(xué)氣相沉積( lp - mocvd )工藝,首先在二氧化硅襯底上生長(zhǎng)納米zns薄膜,然后,在不同溫度下進(jìn)行熱氧化處理。